Formation of large area Al contacts on 6H- and 4H-SiC substrates
author
statement of authorship
O.Korolkov, T.Rang
location of publication
Erlangen/Nurenberg
publisher
year of publication
pages
p. 188
subject term
language
inglise
Korolkov, O., Rang, T. Formation of large area Al contacts on 6H- and 4H-SiC substrates // Abstracts of the 3rd European Conference on Silicon Carbide and Related Materials : ECSCRM'2000 : Sept. 3-7, 2000, Kloster Banz, Germany. Erlangen/Nurenberg : Friedrich Alexander University Press, 2000. p. 188.