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Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphology

author
Podgurski, Vitali
Bogatov, Andrei
Sedov, V.
Sildos, Ilmo
Mere, Arvo
Viljus, Mart
Buijnsters, J. G.
Ralchenko, V.
statement of authorship
V. Podgursky, A. Bogatov, V. Sedov, I. Sildos, A. Mere, M. Viljus, J.G. Buijnsters, V. Ralchenko
source
Diamond and related materials
publisher
Elsevier
journal volume number month
Vol. 58
year of publication
2015
pages
p. 172-179 : ill
url
https://doi.org/10.1016/j.diamond.2015.07.002
subject term
nanokristallid
õhukesed kiled
teemantkatted
vastupidavus
keyword
nanocrystalline diamond films
scaling
growth dynamics
roughness
atomic force microscopy
ISSN
0925-9635
notes
Bibliogr.: 26 ref
scientific publication
teaduspublikatsioon
classifier
1.1
Scopus
Journal metrics at Scopus
Article at Scopus
WOS
Journal metrics at WOS
Article at WOS
category (general)
Physics and astronomy
Engineering
Materials science
Chemistry
category (sub)
Physics and astronomy. General physics and astronomy
Engineering. Mechanical engineering
Engineering. Electrical and electronic engineering
Materials science. Electronic, optical and magnetic materials
Chemistry. General chemistry
Materials science. Materials chemistry
quartile
Q1
TalTech department
materjalitehnika instituut
materjaliteaduse instituut
füüsikainstituut
materjaliuuringute teaduskeskus
language
inglise
Podgurski, V., Bogatov, A., Sedov, V., Sildos, I., Mere, A., Viljus, M., Buijnsters, J., Ralchenko, V. Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphology // Diamond and related materials (2015) Vol. 58, p. 172-179 : ill. https://doi.org/10.1016/j.diamond.2015.07.002