Diffusion welded contacts for silicon semiconductor devices
author
statement of authorship
O. Korolkov, T. Rang
location of publication
Dresden
publisher
year of publication
pages
p. 1035-1037
language
inglise
subject term
Korolkov, O., Rang, T. Diffusion welded contacts for silicon semiconductor devices // Proceedings of the International Conference and Exhibition Micro Materials : MicroMat '97, April 16-18, 1997, Berlin, Germany. Dresden : DDP Goldenbogen, 1997. p. 1035-1037.