A choise of flexible, ultraclean processing strategy for advanced minifabs of competitive ULSI
statement of authorship
A.N.Bubennikov, A.A.Bubennikov
location of publication
[Tallinn]
year of publication
pages
p. 125-128: ill
ISBN
9985-59-026-0
notes
Bibl. 3 ref
language
inglise
subject term
Bubennikov, A.N., Bubennikov, A.A. A choise of flexible, ultraclean processing strategy for advanced minifabs of competitive ULSI // BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings. [Tallinn], 1996. p. 125-128: ill.