prindi

A choise of flexible, ultraclean processing strategy for advanced minifabs of competitive ULSI

autor
Bubennikov, Alexander N.
Bubennikov, Alexander A.
vastutusandmed
A.N.Bubennikov, A.A.Bubennikov
allikas
BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings
ilmumiskoht
[Tallinn]
ilmumisaasta
1996
leheküljed
p. 125-128: ill
märksõna
ULSI-ahelad
uus tehnoloogia
raaltootmine
ISBN
9985-59-026-0
märkused
Bibl. 3 ref
keel
inglise
Bubennikov, A.N., Bubennikov, A.A. A choise of flexible, ultraclean processing strategy for advanced minifabs of competitive ULSI // BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings. [Tallinn], 1996. p. 125-128: ill.