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Atomic layer deposition for hard nanocoatings

author
Jõgiaas, Taivo
Kollo, Lauri
Hussainova, Irina
statement of authorship
Taivo Jõgiaas, ..., Lauri Kollo, ... Irina Hussainova, ... [et al.]
source
Baltic ALD 2014 : 12th International Baltic Conference on Atomic Layer Deposition : May 12-13, 2014, Helsinki, Finland
location of publication
[S.l.]
year of publication
2014
pages
p. 91-92
conference name, date
12th International Baltic Conference on Atomic Layer Deposition, May 12-13, 2014
conference location
Helsinki, Finland
subject term
nanomaterjalid
õhukesed katted
aatomkihtsadestamine
TalTech department
materjalitehnika instituut
language
inglise
Jõgiaas, T., Kollo, L., Hussainova, I. et al. Atomic layer deposition for hard nanocoatings // Baltic ALD 2014 : 12th International Baltic Conference on Atomic Layer Deposition : May 12-13, 2014, Helsinki, Finland. [S.l.], 2014. p. 91-92.