The specificity of solid-phase interaction of aluminium with silicon carbide in the manufacture of diffusion-welded contacts to semiconductor devices

statement of authorship
N. Sleptsuk, O. Korolkov, J. Toompuu, T. Rang, V. Mikli
journal volume number month
Vol. 18, No. 8
year of publication
pages
p. 45-48 : ill
keyword
contacts to semiconductors
solid-phase-interaction
ISSN
1392-1215
2029-5731 (online)
notes
Bibliogr.: 4 ref
language
inglise