Micro- and nano-E-beam lithography using PROXY

statement of authorship
V.V.Aristov, S.V.Dubonos, B.N.Gaifullin, A.A.Svintsov, S.I.Zaitsev, H.F.Raith
location of publication
[Tallinn]
year of publication
pages
p. 121-124: ill
ISBN
9985-59-026-0
notes
Bibl. 13 ref
Aristov, V.V., Dubonos, S.V., Gaifullin, B.N., Svintsov, A.A., Zaitsev, S.I., Raith, H.F. Micro- and nano-E-beam lithography using PROXY // BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings. [Tallinn], 1996. p. 121-124: ill.