Stress relaxation mechanism by strain in the Si-SiO2 system and its influence on the interface properties

statement of authorship
Daniel Kropman, Enn Mellikov, Tiit Kärner, Tõnu Laas, Arthur Medvid, Pavels Onufrijevs, Edvins Dauksta
journal volume number month
Vol. 178/179
year of publication
pages
p. 259-262
keyword
EPR
Si-SiO2-Si3N4 interface
ISSN
1012-0394
language
inglise
Kropman, D., Mellikov, E., Kärner, T., Laas, T., Medvid, A., Onufrijevs, P., Dauksta, E. Stress relaxation mechanism by strain in the Si-SiO2 system and its influence on the interface properties // Solid state phenomena (2011) Vol. 178/179, p. 259-262.