Oluwabi, A.T., Acik, I.O., Katerski, A., Mere, A., Krunks, M.

Structural and electrical characterisation of high-k ZrO2 thin films deposited by chemical spray pyrolysis method

author

Oluwabi, Abayomi Titilope

Oja Acik, Ilona

Katerski, Atanas

Mere, Arvo

Krunks, Malle

statement of authorship

Abayomi T. Oluwabi, Ilona Oja Acik, Atanas Katerski, Arvo Mere, Malle Krunks

source

Thin Solid Films

publisher

Elsevier

journal volume number month

Vol. 662

year of publication

2018

pages

p. 129 - 136

url

https://doi.org/10.1016/j.tsf.2018.07.035

subject term

pihustamine

õhukesed kiled

dielektrilised omadused

oksiidid

keyword

chemical spray pyrolysis

dielectric properties

high-k oxides

thin films

zirconium oxide

ISSN

0040-6090

notes

Bibliogr.: 36 ref

scientific publication

teaduspublikatsioon

classifier

1.1

Scopus

Journal metrics at Scopus

Article at Scopus

WOS

Journal metrics at WOS

Article at WOS

category (general)

Materials science

Physics and astronomy

category (sub)

Materials science. Metals and alloys

Physics and astronomy. Surfaces and interfaces

Materials science. Surfaces, coatings and films

Materials science. Materials chemistry

Materials science. Electronic, optical and magnetic materials

kvartiil

TTÜ department

materjali- ja keskkonnatehnoloogia instituut

language

inglise

Uurimisrühm

Laboratory of thin film energy materials, Laboratory of chemical thin film technologies (until February 28, 2023)

Oluwabi, A.T., Acik, I.O., Katerski, A., Mere, A., Krunks, M. Structural and electrical characterisation of high-k ZrO2 thin films deposited by chemical spray pyrolysis method // Thin Solid Films (2018) Vol. 662, p. 129 - 136. https://doi.org/10.1016/j.tsf.2018.07.035