Atomic layer deposition of high-k dielectrics on carbon nanoparticles
statement of authorship
Aile Tamm, Anna-Liisa Peikolainen, ..., Mihkel Koel, ... [et al.]
source
journal volume number month
538
year of publication
pages
p. 16-20 : ill
keyword
ISSN
0040-6090
notes
Bibliogr.: 15 ref
TTÜ department
language
inglise
Tamm, A., Peikolainen, A.-L., Koel, M. et al. Atomic layer deposition of high-k dielectrics on carbon nanoparticles // Thin solid films (2013) 538, p. 16-20 : ill.