Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining
statement of authorship
Arvi Krusing, Sepo Lepävuori, Antti Uusimäki, Mati Uusimäki
source
Design, Test and Microfabrication of MEMS and MOEMS : 30 March-1 April, 1999, Paris, France
location of publication
[S.l.]
publisher
year of publication
pages
p. 870-878 : ill
series
Proceedings of SPIE ; 3680, 2
ISSN
0277-786X
notes
Bibliogr.: 35 ref
language
inglise
keyword
laser machining
abrasive-jet machining
silcon microstructures
Kruusing, A., Leppävuori, S., Uusimäki, A., Uusimäki, M. Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining // Design, Test and Microfabrication of MEMS and MOEMS : 30 March-1 April, 1999, Paris, France. [S.l.] : SPIE, 1999. p. 870-878 : ill. (Proceedings of SPIE ; 3680, 2).