Jõgiaas, T., Zabels, R., Tamm, A., Merisalu, M., Hussainova, I. et al.

Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition

author

Jõgiaas, Taivo

Zabels, Roberts

Tamm, Aile

Merisalu, Maido

Hussainova, Irina

statement of authorship

Taivo Jõgiaas, Roberts Zabels, Aile Tamm, Maido Merisalu, Irina Hussainova, ... [et al.]

source

Surface and coatings technology

journal volume number month

Vol. 282

year of publication

2015

pages

p. 36-42 : ill

url

http://dx.doi.org/10.1016/j.surfcoat.2015.10.008

subject term

nanomaterjalid

mehaanilised omadused

aatomkihtsadestamine

õhukesed kiled

keyword

instrumented nano-indentation

metal oxide nano-laminates

mechanical properties

thin film

atomic layer deposition

ISSN

0257-8972

notes

Bibliogr.: 30 ref

TTÜ department

materjalitehnika instituut

language

inglise

Jõgiaas, T., Zabels, R., Tamm, A., Merisalu, M., Hussainova, I. et al. Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition // Surface and coatings technology (2015) Vol. 282, p. 36-42 : ill. http://dx.doi.org/10.1016/j.surfcoat.2015.10.008