Jõgiaas, T., Zabels, R., Tamm, A., Merisalu, M., Hussainova, I. et al.

Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition

author

Jõgiaas, Taivo

Zabels, Roberts

Tamm, Aile

Merisalu, Maido

Hussainova, Irina

statement of authorship

Taivo Jõgiaas, Roberts Zabels, Aile Tamm, Maido Merisalu, Irina Hussainova, ... [et al.]

source

Surface and coatings technology

publisher

Elsevier

journal volume number month

Vol. 282

year of publication

2015

pages

p. 36-42 : ill

url

https://doi.org/10.1016/j.surfcoat.2015.10.008

subject term

nanomaterjalid

mehaanilised omadused

aatomkihtsadestamine

õhukesed kiled

keyword

instrumented nano-indentation

metal oxide nano-laminates

mechanical properties

thin film

atomic layer deposition

ISSN

0257-8972

notes

Bibliogr.: 30 ref

scientific publication

teaduspublikatsioon

classifier

1.1

Scopus

Journal metrics at Scopus

Article at Scopus

WOS

Journal metrics at WOS

Article at WOS

category (general)

Physics and astronomy

Materials science

Chemistry

category (sub)

Physics and astronomy. Condensed matter physics

Materials science. Materials chemistry

Materials science. Surfaces, coatings and films

Chemistry. General chemistry

Physics and Astronomy. Surfaces and interfaces

kvartiil

TTÜ department

materjalitehnika instituut

language

inglise

Jõgiaas, T., Zabels, R., Tamm, A., Merisalu, M., Hussainova, I. et al. Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition // Surface and coatings technology (2015) Vol. 282, p. 36-42 : ill. https://doi.org/10.1016/j.surfcoat.2015.10.008