Low-K factor of SiO2 layer on Si irradiated by YAG:Nd laser
author
statement of authorship
A.Medvid, P.Onufrijevs, E.Mellikov, D.Kropman, F.Muktepavela, G.Bakradze
journal volume number month
353
year of publication
pages
p. 703-707 : ill
subject term
ISSN
0022-3093
notes
Bibliogr.: 13 ref
language
inglise
Medvid, A., Onufrijevs, P., Mellikov, E., Kropman, D., Muktepavela, F., Bakradze, G.* Low-K factor of SiO2 layer on Si irradiated by YAG:Nd laser // Journal of non-crystalline solids (2007) 353, p. 703-707 : ill.