Martins, M.G.A., Pagliarini, S.N., Isgenc, M.M., Pileggi, L.

From virtual characterization to test-chips : DFM analysis through pattern enumeration

author

Martins, Mayler G.A.

Pagliarini, Samuel Nascimento

Isgenc, Mehmet Meric

Pileggi, Larry

statement of authorship

Mayler G.A. Martins, Samuel N. Pagliarini, Mehmet Meric Isgenc, Larry Pileggi

source

IEEE transactions on computer-aided design of integrated circuits and systems

publisher

IEEE

journal volume number month

vol. 39, no. 2

year of publication

2020

pages

p. 520-532

url

https://doi.org//10.1109/TCAD.2018.2889772

subject term

integraallülitused

standardid (normid)

räni

litograafia

keyword

Libraries

Microsoft Windows

Silicon

Layout

Lithography

Shape

Standards

Design for manufacturability

DFM analysis

pattern enumeration

test-chips

virtual characterization

ISSN

0278-0070

scientific publication

teaduspublikatsioon

classifier

1.1

TTÜ department

arvutisüsteemide instituut

language

inglise

Martins, M.G.A., Pagliarini, S.N., Isgenc, M.M., Pileggi, L. From virtual characterization to test-chips : DFM analysis through pattern enumeration // IEEE transactions on computer-aided design of integrated circuits and systems (2020) vol. 39, no. 2, p. 520-532. https://doi.org//10.1109/TCAD.2018.2889772