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Design, Test and Microfabrication of MEMS and MOEMS : 30 March-1 April, 1999, Paris, France (source)
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book article
Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining
Kruusing, Arvi
;
Leppävuori, Seppo
;
Uusimäki, Antti
;
Uusimäki, M.
Design, Test and Microfabrication of MEMS and MOEMS : 30 March-1 April, 1999, Paris, France
1999
/
p. 870-878 : ill
https://opticalengineering.spiedigitallibrary.org/conference-proceedings-of-spie/3680/0000/Rapid-prototyping-of-silicon-structures-by-aid-of-laser-and/10.1117/12.341285.full
book article
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