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Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition (title)
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journal article EST
/
journal article ENG
Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition
Jõgiaas, Taivo
;
Zabels, Roberts
;
Tamm, Aile
;
Merisalu, Maido
;
Hussainova, Irina
Surface and coatings technology
2015
/
p. 36-42 : ill
https://doi.org/10.1016/j.surfcoat.2015.10.008
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journal article EST
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atomic layer deposition
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atomic layer deposition (ALD)
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