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Impurity interaction with point defects in the Si-SiO2 structures and its influence on the interface properties (title)
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journal article
Impurity interaction with point defects in the Si-SiO2 structures and its influence on the interface properties
Kropman, Daniel
;
Mellikov, Enn
;
Kärner, T.
;
Ugaste, Ülo
;
Laas, Tõnu
;
Heinmaa, I.
;
Medvid, A.
Materials science and engineering : B
2006
/
p. 222-226 : ill
https://www.sciencedirect.com/science/article/pii/S0921510706004375
journal article
Number of records 1, displaying
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keyword
5
1.
Si-SiO2 interface
2.
Si-SiO2-Si3N4 interface
3.
Si-SiO2 system
4.
interface defects
5.
point defects
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