Toggle navigation
Publications
Profiles
Research Groups
Indexes
Help and information
Eesti keeles
Intranet
Publications
Profiles
Research Groups
Indexes
Help and information
Eesti keeles
Intranet
Databases
Publications
Advanced search
My bookmarks
0
Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining (title)
All fields
Source search
Author search
Subject term search
Title search
source
author
DOI
year of publication
location of publication
supervisor
category
publisher
classifier
conference location
quartile
availibility
subject term
title
series
name of the person
TalTech subject term
TalTech department
url
keyword
All fields
author
co-contibutor
commentator
compiler
corporate author
editor
expert
interviewer
supervisor
translator
series variant title
title
translation of title
variant title
source
special issue
name of the institution
subject of form
subject of location
subject of time
subject term
series
series variant title
availibility
Open Access
category (general)
category (sub)
starts with
containes
exact match
All fields
Source search
Author search
Subject term search
Title search
source
author
DOI
year of publication
location of publication
supervisor
category
publisher
classifier
conference location
quartile
availibility
subject term
title
series
name of the person
TalTech subject term
TalTech department
url
keyword
All fields
author
co-contibutor
commentator
compiler
corporate author
editor
expert
interviewer
supervisor
translator
series variant title
title
translation of title
variant title
source
special issue
name of the institution
subject of form
subject of location
subject of time
subject term
series
series variant title
availibility
Open Access
category (general)
category (sub)
starts with
containes
exact match
All fields
Source search
Author search
Subject term search
Title search
source
author
DOI
year of publication
location of publication
supervisor
category
publisher
classifier
conference location
quartile
availibility
subject term
title
series
name of the person
TalTech subject term
TalTech department
url
keyword
All fields
author
co-contibutor
commentator
compiler
corporate author
editor
expert
interviewer
supervisor
translator
series variant title
title
translation of title
variant title
source
special issue
name of the institution
subject of form
subject of location
subject of time
subject term
series
series variant title
availibility
Open Access
category (general)
category (sub)
starts with
containes
exact match
All fields
Source search
Author search
Subject term search
Title search
source
author
DOI
year of publication
location of publication
supervisor
category
publisher
classifier
conference location
quartile
availibility
subject term
title
series
name of the person
TalTech subject term
TalTech department
url
keyword
All fields
author
co-contibutor
commentator
compiler
corporate author
editor
expert
interviewer
supervisor
translator
series variant title
title
translation of title
variant title
source
special issue
name of the institution
subject of form
subject of location
subject of time
subject term
series
series variant title
availibility
Open Access
category (general)
category (sub)
starts with
containes
exact match
—
All fields
Source search
Author search
Subject term search
Title search
source
author
DOI
year of publication
location of publication
supervisor
category
publisher
classifier
conference location
quartile
availibility
subject term
title
series
name of the person
TalTech subject term
TalTech department
url
keyword
All fields
author
co-contibutor
commentator
compiler
corporate author
editor
expert
interviewer
supervisor
translator
series variant title
title
translation of title
variant title
source
special issue
name of the institution
subject of form
subject of location
subject of time
subject term
series
series variant title
availibility
Open Access
category (general)
category (sub)
starts with
containes
exact match
—
Add criteria
Simple search
filter
Clear
×
types of item
book
..
journal article
..
newspaper article
..
book article
..
dissertation
..
Open Access
..
Scientific publications
..
year
year of publication
Loading..
author
Loading..
TalTech department
Loading..
subject term
Loading..
series
Loading..
name of the person
Loading..
keyword
Loading..
Clear
Number of records
1
Look more..
(1/5)
Export
export all inquiry results
(1)
Save TXT fail
print
Open for editing with marked entries
my bookmarks
display
Bibliographic view
Short view
sort
author ascending
author descending
year of publication ascending
year of publication descending
title ascending
title descending
1
book article
Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining
Kruusing, Arvi
;
Leppävuori, Seppo
;
Uusimäki, Antti
;
Uusimäki, M.
Design, Test and Microfabrication of MEMS and MOEMS : 30 March-1 April, 1999, Paris, France
1999
/
p. 870-878 : ill
https://opticalengineering.spiedigitallibrary.org/conference-proceedings-of-spie/3680/0000/Rapid-prototyping-of-silicon-structures-by-aid-of-laser-and/10.1117/12.341285.full
book article
Number of records 1, displaying
1 - 1
keyword
5
1.
abrasive-jet machining
2.
rapid control prototyping
3.
rapid prototyping
4.
rapid prototyping technologies
5.
laser machining
×
match
starts with
ends with
containes
sort
Relevance
ascending
descending
year of publication
author
TalTech department
subject term
series
name of the person
keyword
Otsing
Valikud
0
year of publication
AND
OR
NOT
author
AND
OR
NOT
TalTech department
AND
OR
NOT
subject term
AND
OR
NOT
series
AND
OR
NOT
name of the person
AND
OR
NOT
keyword
AND
OR
NOT