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Experimental study of surface distortions in silicon carbide caused by diffusion welding (title)
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book article
Experimental study of surface distortions in silicon carbide caused by diffusion welding
Mizsei, Janos
;
Korolkov, Oleg
;
Sleptšuk, Natalja
;
Toompuu, Jana
;
Rang, Toomas
BEC 2012 : 2012 13th Biennial Baltic Electronics Conference : proceedings of the 13th Biennial Baltic Electronics Conference : October 3-5, 2012, Tallinn, Estonia
2012
/
p. 53-56 : ill
book article
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keyword
6
1.
diffusion welding
2.
wafer bonding/diffusion welding
3.
nano-silicon carbide
4.
silicon carbide
5.
silicon carbide (SiC)
6.
silicon carbide JBS diodes
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