MICRO SYSTEM Technologies 98 : 6th International Conference and Exhibition on Micro Electro, Opto, Mechanical Systems and Components : Potsdam, Germany, December 1-3, 1998 (source)

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    Mask-defined abrasive-jet micromachiningKruusing, Arvi; Leppävuori, Seppo; Uusimäki, Antti; Uusimäki, M.MICRO SYSTEM Technologies 98 : 6th International Conference and Exhibition on Micro Electro, Opto, Mechanical Systems and Components : Potsdam, Germany, December 1-3, 19981998 / p. 673-675
    book article
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