Kruusing, A., Leppävuori, S., Uusimäki, A., Uusimäki, M.

Mask-defined abrasive-jet micromachining

author

Kruusing, Arvi

Leppävuori, Seppo

Uusimäki, Antti

Uusimäki, M.

statement of authorship

A. Kruusing, S. Leppävuori, A. Uusimäki, M. Uusimäki

source

MICRO SYSTEM Technologies 98 : 6th International Conference and Exhibition on Micro Electro, Opto, Mechanical Systems and Components : Potsdam, Germany, December 1-3, 1998

location of publication

Berlin

publisher

VDE Verlag

year of publication

1998

pages

p. 673-675

language

inglise

Kruusing, A., Leppävuori, S., Uusimäki, A., Uusimäki, M. Mask-defined abrasive-jet micromachining // MICRO SYSTEM Technologies 98 : 6th International Conference and Exhibition on Micro Electro, Opto, Mechanical Systems and Components : Potsdam, Germany, December 1-3, 1998. Berlin : VDE Verlag, 1998. p. 673-675.