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Interaction between point defects, extended defects and impurities in the Si-SiO2 system during the process of its formation (title)
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journal article
Interaction between point defects, extended defects and impurities in the Si-SiO2 system during the process of its formation
Kropman, Daniel
;
Kärner, T.
;
Abru, Uno
;
Ugaste, Ülo
;
Mellikov, Enn
Thin solid films
2004
/
1/2, p. 53-57 : ill
journal article
2
journal article
Interaction between point defects, extended defects and impurities in the Si-SiO2 system during the process of its formation
Kropman, Daniel
;
Kärner, T.
;
Abru, Uno
;
Ugaste, Ülo
;
Mellikov, Enn
;
Kauk, Marit
Materials science and engineering : B
2004
/
p. 295-298 : ill
journal article
Number of records 2, displaying
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keyword
3
1.
point defects
2.
Si-SiO2 interface
3.
Si-SiO2-Si3N4 interface
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