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AFM and SEM investigations of ion beam synthesized Mg2Si precipitates in Si substrates (title)

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AFM and SEM investigations of ion beam synthesized Mg2Si precipitates in Si substratesAngelov, Christo; Mikli, Valdek; Amov, Blagoj; Goranova, E.Journal of optoelectronics and advanced materials2005 / 1, p. 369-373 https://old.joam.inoe.ro/arhiva/pdf7_1/Angelov3.pdf

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