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Structural and electrical characterisation of high-k ZrO2 thin films deposited by chemical spray pyrolysis method (title)

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Structural and electrical characterisation of high-k ZrO2 thin films deposited by chemical spray pyrolysis methodOluwabi, Abayomi Titilope; Oja Acik, Ilona; Katerski, Atanas; Mere, Arvo; Krunks, MalleThin Solid Films2018 / p. 129 - 136 https://doi.org/10.1016/j.tsf.2018.07.035 Journal metrics at Scopus Article at Scopus Journal metrics at WOS Article at WOS

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