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Creation of diffractive optical elements by one step e-beam lithography for optoelectronics and X-ray lithography (title)

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Creation of diffractive optical elements by one step e-beam lithography for optoelectronics and X-ray lithographyAristov, V.V.; Dubonos, S.V.; Dyachenko, R.Ya.; Gaifullin, B.N.; Matveev, V.N.; Svintsov, A.A.; Zaitsev, S.I.BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings1996 / p. 483-486: ill

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