Aristov, V.V., Dubnos, S.V., Dyachenko, R.Ya., Gaifullin, B.N., Matveev, V.N., Svintsov, A.A., Zaitsev, S.I.

full record print

Creation of diffractive optical elements by one step e-beam lithography for optoelectronics and X-ray lithography

author

Aristov, V.V.

Dubonos, S.V.

Dyachenko, R.Ya.

Gaifullin, B.N.

Matveev, V.N.

Svintsov, A.A.

Zaitsev, S.I.

statement of authorship

V.V.Aristov, S.V.Dubonos, R.Ya.Dyachenko, B.N.Gaifullin, V.N.Matveev, A.A.Svintsov and S.I.Zaitsev

source

BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings

location of publication

[Tallinn]

year of publication

1996

pages

p. 483-486: ill

ISBN

9985-59-026-0

notes

Bibl. 14 ref

language

inglise

Märksõnad ja võtmesõnad

subject term

optoelektroonika

röntgenlitograafia

optikaelemendid

difraktsioon

Aristov, V.V., Dubnos, S.V., Dyachenko, R.Ya., Gaifullin, B.N., Matveev, V.N., Svintsov, A.A., Zaitsev, S.I. Creation of diffractive optical elements by one step e-beam lithography for optoelectronics and X-ray lithography // BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings. [Tallinn], 1996. p. 483-486: ill.