Creation of diffractive optical elements by one step e-beam lithography for optoelectronics and X-ray lithography

statement of authorship
V.V.Aristov, S.V.Dubonos, R.Ya.Dyachenko, B.N.Gaifullin, V.N.Matveev, A.A.Svintsov and S.I.Zaitsev
location of publication
[Tallinn]
year of publication
pages
p. 483-486: ill
ISBN
9985-59-026-0
notes
Bibl. 14 ref
Aristov, V.V., Dubnos, S.V., Dyachenko, R.Ya., Gaifullin, B.N., Matveev, V.N., Svintsov, A.A., Zaitsev, S.I. Creation of diffractive optical elements by one step e-beam lithography for optoelectronics and X-ray lithography // BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings. [Tallinn], 1996. p. 483-486: ill.