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Comparative characteristics of diffusion welded Al contacts to 6H- and 4H-SiC substrates (title)
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Comparative characteristics of diffusion welded Al contacts to 6H- and 4H-SiC substrates
Korolkov, Oleg
;
Rang, Toomas
The 7th Biennial Conference on Electronics and Microsystem Technology "Baltic Electronics Conference" : BEC 2000 : October 8 - 11, 2000, Tallinn, Estonia : conference proceedings
2000
/
p. 23-26 : ill
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5
1.
p-6H-SiC
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6H-SiC
3.
p-type 4H-SiC
4.
4H-SiC
5.
diffusion welded stacks
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