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Formation of large area Al contacts on 6H- and 4H-SiC substrates (title)
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book article
Formation of large area Al contacts on 6H- and 4H-SiC substrates
Korolkov, Oleg
;
Rang, Toomas
Abstracts of the 3rd European Conference on Silicon Carbide and Related Materials : ECSCRM'2000 : Sept. 3-7, 2000, Kloster Banz, Germany
2000
/
p. 188
https://www.scientific.net/MSF.353-356.603
book article
2
book article
Formation of large area Al contacts on 6H- and 4H-SiC substrates
Korolkov, Oleg
;
Rang, Toomas
Silicon Carbide and Related Materials : ECSCRM2000 : proceedings of the 3rd European Conference on Silicon Carbide and Related Materials : Kloster Banz, Germany, September 2000
2001
/
p. 603-606 : ill
book article
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keyword
5
1.
p-6H-SiC
2.
6H-SiC
3.
p-type 4H-SiC
4.
4H-SiC
5.
large area
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