Rudenja, S., Kulu, P., Talimets, E., Mikli, V., Straede, C.A., Zwieg, T.

full record print

Electrochemical evaluation of TiN coatings

author

Rudenja, Sergei

Kulu, Priit

Talimets, Ellen

Mikli, Valdek

Straede, C.A.

Zwieg, T.

statement of authorship

S. Rudenja, P. Kulu, E. Talimets, V. Mikli, C.A. Straede and T. Zwieg

source

Proceedings of the Symposium on Interconnect and Contact Metallization

location of publication

Pennington

publisher

The Electrochemical Society

year of publication

1998

pages

p. 108-119 : ill

series

The Electrochemical Society proceedings ; Vol. 97, 31

ISSN

0161-6374

ISBN

1-56677-184-6

notes

Bibliogr.: 30 ref

language

inglise

Märksõnad ja võtmesõnad

subject term

elektrokeemia

kattematerjalid

Rudenja, S., Kulu, P., Talimets, E., Mikli, V., Straede, C.A., Zwieg, T. Electrochemical evaluation of TiN coatings // Proceedings of the Symposium on Interconnect and Contact Metallization. Pennington : The Electrochemical Society, 1998. p. 108-119 : ill. (The Electrochemical Society proceedings ; Vol. 97, 31).