Metallization technologies for wide band-gap semiconductor substrates : (invited paper)
statement of authorship
Toomas Rang, Oleg Korolkov, Mihhail Pikkov
location of publication
Kaunas
publisher
year of publication
pages
p. 27-30
subject term
language
inglise
Rang, T., Korolkov, O., Pikkov, M. Metallization technologies for wide band-gap semiconductor substrates : (invited paper) // Proceedings of the 6th Nexuspan Workshop Microsystems Technology Activities in Baltic Region : 23-24 April, 1999, Vilnius, Lithuania. Kaunas : Technologija, 1999. p. 27-30.