Rang, T., Korolkov, O., Pikkov, M. - TalTech Research Portal

full record print

Metallization technologies for wide band-gap semiconductor substrates : (invited paper)

author

Rang, Toomas

Korolkov, Oleg

Pikkov, Mihhail

statement of authorship

Toomas Rang, Oleg Korolkov, Mihhail Pikkov

source

Proceedings of the 6th Nexuspan Workshop Microsystems Technology Activities in Baltic Region : 23-24 April, 1999, Vilnius, Lithuania

location of publication

Kaunas

publisher

Technologija

year of publication

1999

pages

p. 27-30

language

inglise

Märksõnad ja võtmesõnad

subject term

pooljuhtseadised

tehnoloogia

metallitamine

Rang, T., Korolkov, O., Pikkov, M. Metallization technologies for wide band-gap semiconductor substrates : (invited paper) // Proceedings of the 6th Nexuspan Workshop Microsystems Technology Activities in Baltic Region : 23-24 April, 1999, Vilnius, Lithuania. Kaunas : Technologija, 1999. p. 27-30.