Modelling of metal alloy contacts to semiconductor substrate
author
statement of authorship
T.Rang
source
Simulation and design of microsystems and microstructures
location of publication
Southampton
publisher
year of publication
pages
p. 251-258: ill
ISBN
1-85312-390-0
notes
Bibl. 10 ref
language
inglise
subject term
Rang, T. Modelling of metal alloy contacts to semiconductor substrate // Simulation and design of microsystems and microstructures. Southampton : Computational Mechanics Publications, 1995. p. 251-258: ill.