prindi

Technonomics of manufacturing of silicon microsystems on WSI

autor
Bubennikov, Alexander N.
Bubennikov, Alexander A.
vastutusandmed
A.N.Bubennikov, A.A.Bubennikov
allikas
BEC'98 : the 6th Biennial Conference on Electronics and Microsystems Technology, October 7-9, 1998, Tallinn, Estonia : proceedings
ilmumiskoht
[Tallinn]
ilmumisaasta
1998
leheküljed
p. 29-32: ill
ISBN
9985-59-081-3
märkused
Bibl. 7 ref
Bubennikov, A.N., Bubennikov, A.A. Technonomics of manufacturing of silicon microsystems on WSI // BEC'98 : the 6th Biennial Conference on Electronics and Microsystems Technology, October 7-9, 1998, Tallinn, Estonia : proceedings. [Tallinn], 1998. p. 29-32: ill.