Technonomics of manufacturing of silicon microsystems on WSI
vastutusandmed
A.N.Bubennikov, A.A.Bubennikov
ilmumiskoht
[Tallinn]
kirjastus/väljaandja
ilmumisaasta
leheküljed
p. 29-32: ill
ISBN
9985-59-081-3
märkused
Bibl. 7 ref
keel
inglise
Bubennikov, A.N., Bubennikov, A.A. Technonomics of manufacturing of silicon microsystems on WSI // BEC'98 : the 6th Biennial Conference on Electronics and Microsystems Technology, October 7-9, 1998, Tallinn, Estonia : proceedings. [Tallinn] : Tallinn University of Technology, 1998. p. 29-32: ill.