Pb and Bi nanoclaster precipitation in high-dose implated and RTA Si: SEM and RHEED analyses

autor
Kalitzova, M.
Beshkov, G.
vastutusandmed
Ch. Angelov, V. Mikli, M. Kalitzova, G. Beshkov
ilmumiskoht
[S.l.]
ilmumisaasta
leheküljed
p. 452-455
keel
inglise
Angelov, Ch., Mikli, V., Kalitzova, M., Beshkov, G. Pb and Bi nanoclaster precipitation in high-dose implated and RTA Si: SEM and RHEED analyses // Proceedings of 11th Conference "Materials for Information Tech. in the New Millenium" : ISCMP : Varna, 2001. [S.l.], 2001. p. 452-455.