Electrochemical evaluation of TiN coatings
statement of authorship
S. Rudenja, P. Kulu, E. Talimets, V. Mikli, C.A. Straede and T. Zwieg
source
Proceedings of the Symposium on Interconnect and Contact Metallization
location of publication
Pennington
publisher
year of publication
pages
p. 108-119 : ill
series
The Electrochemical Society proceedings ; Vol. 97, 31
subject term
ISSN
0161-6374
ISBN
1-56677-184-6
notes
Bibliogr.: 30 ref
language
inglise
Rudenja, S., Kulu, P., Talimets, E., Mikli, V., Straede, C.A., Zwieg, T. Electrochemical evaluation of TiN coatings // Proceedings of the Symposium on Interconnect and Contact Metallization. Pennington : The Electrochemical Society, 1998. p. 108-119 : ill. (The Electrochemical Society proceedings ; Vol. 97, 31).