Rudenja, S., Kulu, P., Talimets, E., Mikli, V., Straede, C.A., Zwieg, T.

prindi

Electrochemical evaluation of TiN coatings

autor

Rudenja, Sergei

Kulu, Priit

Talimets, Ellen

Mikli, Valdek

Straede, C.A.

Zwieg, T.

vastutusandmed

S. Rudenja, P. Kulu, E. Talimets, V. Mikli, C.A. Straede and T. Zwieg

allikas

Proceedings of the Symposium on Interconnect and Contact Metallization

ilmumiskoht

Pennington

kirjastus/väljaandja

The Electrochemical Society

ilmumisaasta

1998

leheküljed

p. 108-119 : ill

seeria-sari

The Electrochemical Society proceedings ; Vol. 97, 31

märksõna

elektrokeemia

kattematerjalid

ISSN

0161-6374

ISBN

1-56677-184-6

märkused

Bibliogr.: 30 ref

keel

inglise

Rudenja, S., Kulu, P., Talimets, E., Mikli, V., Straede, C.A., Zwieg, T. Electrochemical evaluation of TiN coatings // Proceedings of the Symposium on Interconnect and Contact Metallization. Pennington : The Electrochemical Society, 1998. p. 108-119 : ill. (The Electrochemical Society proceedings ; Vol. 97, 31).