Electrochemical evaluation of TiN coatings
vastutusandmed
S. Rudenja, P. Kulu, E. Talimets, V. Mikli, C.A. Straede and T. Zwieg
allikas
Proceedings of the Symposium on Interconnect and Contact Metallization
ilmumiskoht
Pennington
kirjastus/väljaandja
ilmumisaasta
leheküljed
p. 108-119 : ill
seeria-sari
The Electrochemical Society proceedings ; Vol. 97, 31
ISSN
0161-6374
ISBN
1-56677-184-6
märkused
Bibliogr.: 30 ref
keel
inglise
Rudenja, S., Kulu, P., Talimets, E., Mikli, V., Straede, C.A., Zwieg, T. Electrochemical evaluation of TiN coatings // Proceedings of the Symposium on Interconnect and Contact Metallization. Pennington : The Electrochemical Society, 1998. p. 108-119 : ill. (The Electrochemical Society proceedings ; Vol. 97, 31).