Aristov, V.V., Dubnos, S.V., Dyachenko, R.Ya., Gaifullin, B.N., Matveev, V.N., Svintsov, A.A., Zaitsev, S.I.

Creation of diffractive optical elements by one step e-beam lithography for optoelectronics and X-ray lithography

author

Aristov, V.V.

Dubonos, S.V.

Dyachenko, R.Ya.

Gaifullin, B.N.

Matveev, V.N.

Svintsov, A.A.

Zaitsev, S.I.

statement of authorship

V.V.Aristov, S.V.Dubonos, R.Ya.Dyachenko, B.N.Gaifullin, V.N.Matveev, A.A.Svintsov and S.I.Zaitsev

source

BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings

location of publication

[Tallinn]

year of publication

1996

pages

p. 483-486: ill

subject term

optoelektroonika

röntgenlitograafia

optikaelemendid

difraktsioon

ISBN

9985-59-026-0

notes

Bibl. 14 ref

language

inglise

Aristov, V.V., Dubnos, S.V., Dyachenko, R.Ya., Gaifullin, B.N., Matveev, V.N., Svintsov, A.A., Zaitsev, S.I. Creation of diffractive optical elements by one step e-beam lithography for optoelectronics and X-ray lithography // BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings. [Tallinn], 1996. p. 483-486: ill.