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Study of ion implanted Fe depth distribution in Si after pulsed ion beam treatment (title)
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journal article
Study of ion implanted Fe depth distribution in Si after pulsed ion beam treatment
Angelov, Christo
;
Georgiev, S.
;
Amov, Blagoj
;
Goranova, E.
;
Mikli, Valdek
;
Dezsi, I.
;
Kotai, E.
Journal of optoelectronics and advanced materials
2007
/
2, p. 307-310
https://www.researchgate.net/publication/289186791_Study_of_the_ion_implanted_Fe_depth_distribution_in_Si_after_pulsed_ion_beam_treatment
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Beam-line instrumentation (beam position and profile monitors, beam-intensity monitors, bunch length monitors)
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