Proceedings of the Symposium on Interconnect and Contact Metallization (source)

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    Electrochemical evaluation of TiN coatingsRudenja, Sergei; Kulu, Priit; Talimets, Ellen; Mikli, Valdek; Straede, C.A.; Zwieg, T.Proceedings of the Symposium on Interconnect and Contact Metallization1998 / p. 108-119 : ill
    book article
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