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Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphology (title)

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Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphologyPodgurski, Vitali; Bogatov, Andrei; Sedov, V.; Sildos, Ilmo; Mere, Arvo; Viljus, Mart; Buijnsters, J. G.; Ralchenko, V.Diamond and related materials2015 / p. 172-179 : ill https://doi.org/10.1016/j.diamond.2015.07.002 Journal metrics at Scopus Article at Scopus Journal metrics at WOS Article at WOS

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