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Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphology

author
statement of authorship
V. Podgursky, A. Bogatov, V. Sedov, I. Sildos, A. Mere, M. Viljus, J.G. Buijnsters, V. Ralchenko
source
publisher
journal volume number month
Vol. 58
year of publication
pages
p. 172-179 : ill
url
ISSN
0925-9635
notes
Bibliogr.: 26 ref
scientific publication
teaduspublikatsioon
language
inglise
Podgurski, V., Bogatov, A., Sedov, V., Sildos, I., Mere, A., Viljus, M., Buijnsters, J., Ralchenko, V. Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphology // Diamond and related materials (2015) Vol. 58, p. 172-179 : ill. https://doi.org/10.1016/j.diamond.2015.07.002