Podgurski, V., Bogatov, A., Sedov, V., Sildos, I., Mere, A., Viljus, M., Buijnsters, J., Ralchenko, V.

Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphology

author

Podgurski, Vitali

Bogatov, Andrei

Sedov, V.

Sildos, Ilmo

Mere, Arvo

Viljus, Mart

Buijnsters, J. G.

Ralchenko, V.

statement of authorship

V. Podgursky, A. Bogatov, V. Sedov, I. Sildos, A. Mere, M. Viljus, J.G. Buijnsters, V. Ralchenko

source

Diamond and related materials

journal volume number month

Vol. 58

year of publication

2015

pages

p. 172-179 : ill

url

http://dx.doi.org/10.1016/j.diamond.2015.07.002

subject term

nanokristallid

õhukesed kiled

teemantkatted

vastupidavus

keyword

nanocrystalline diamond films

scaling

growth dynamics

roughness

atomic force microscopy

ISSN

0925-9635

notes

Bibliogr.: 26 ref

TTÜ department

materjalitehnika instituut

materjaliteaduse instituut

füüsikainstituut

materjaliuuringute teaduskeskus

language

inglise

Podgurski, V., Bogatov, A., Sedov, V., Sildos, I., Mere, A., Viljus, M., Buijnsters, J., Ralchenko, V. Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphology // Diamond and related materials (2015) Vol. 58, p. 172-179 : ill. http://dx.doi.org/10.1016/j.diamond.2015.07.002