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Ali, Saima (author)

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Review article : recommended reading list of early publications on atomic layer deposition-outcome of the "Virtual Project on the History of ALD"Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Rauwel, ErwanJournal of vacuum science & technology A : vacuum, surfaces, and films2017 / p. 010801-1 - 010801-13 https://doi.org/10.1116/1.4971389 Journal metrics at Scopus Article at Scopus Journal metrics at WOS Article at WOS

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