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Comparative study of siox layers deposition using thermal and uv-assisted curing of perhydropolysilazane (title)

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Comparative study of siox layers deposition using thermal and uv-assisted curing of perhydropolysilazaneShmagina, Elizaveta; Bereznev, SergeiGSFMT Scientific Conference 2021 : Tartu, June 14-15, 2021 : abstracts2021 / P 50 https://fmtdk.ut.ee/wp-content/uploads/2021/06/GSFMT_abstractbook_2021.pdf

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