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Atomic layer deposition of high-k dielectrics on carbon nanoparticles (title)

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Atomic layer deposition of high-k dielectrics on carbon nanoparticlesTamm, Aile; Koel, Mihkel; Peikolainen, Anna-LiisaThin solid films2013 / p. 16-20 : ill https://doi.org/10.1016/j.tsf.2012.09.071 Journal metrics at Scopus Article at Scopus Journal metrics at WOS Article at WOS

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