A DLTS study of 4H-SiC-based p-n junctions fabricated by boron implantation

statement of authorship
P. A. Ivanov, A. S. Potapov, T. P. Samsonova, O. Korol’kov, and N. Sleptsuk
journal volume number month
Vol. 45, 10
year of publication
pages
p. 1306-1310 : ill
ISSN
1063-7826
notes
Bibliogr.: 13 ref
language
inglise
Ivanov, P.A., Potapov, A.S., Samsonova, T.P., Korolkov, O., Sleptsuk, N. A DLTS study of 4H-SiC-based p-n junctions fabricated by boron implantation // Semiconductors (2011) Vol. 45, 10, p. 1306-1310 : ill. https://doi.org/10.1134/S1063782611100101