Understanding and control of stress at Si-SiO2 interface
author
Vitusevich, Svetlana
statement of authorship
Daniel Kropman, Viktor Seeman, Arturs Medvids, Pavels Onufrijevs, Svetlana Vitusevich, Valdek Mikli
source
publisher
journal volume number month
vol. 850
year of publication
pages
p. 291−296
conference name, date
60th International Scientific Conference of Riga Technical University Section of Materials Science and Applied Chemistry, MSAC 2019, 24 October 2019
conference location
Riga, Latvia
ISSN
1662-9795
1013-9826
notes
Bibliogr.: 6 ref
scientific publication
teaduspublikatsioon
language
inglise
subject term
keyword
category (general)
TTÜ department
Reserch Group
Kropman, D., Seeman, V., Medvids, A., Onufrijevs, P., Vitusevich, S., Mikli, V. Understanding and control of stress at Si-SiO2 interface // Key engineering materials (2020) vol. 850, p. 291−296.