prindi

Formation of large area Al contacts on 6H- and 4H-SiC substrates

autor
Korolkov, Oleg
Rang, Toomas
vastutusandmed
O.Korolkov and T.Rang
allikas
Silicon Carbide and Related Materials : ECSCRM2000 : proceedings of the 3rd European Conference on Silicon Carbide and Related Materials : Kloster Banz, Germany, September 2000
ilmumiskoht
[S. l.]
kirjastus/väljaandja
Trans Tech Publications
ilmumisaasta
2001
leheküljed
p. 603-606 : ill
märksõna
ränikarbiid
ISBN
0-87849-873-7
märkused
Bibliogr.: 4 ref
keel
inglise
Korolkov, O., Rang, T. Formation of large area Al contacts on 6H- and 4H-SiC substrates // Silicon Carbide and Related Materials : ECSCRM2000 : proceedings of the 3rd European Conference on Silicon Carbide and Related Materials : Kloster Banz, Germany, September 2000. [S. l.] : Trans Tech Publications, 2001. p. 603-606 : ill.