Angelov, Ch., Groudev, P., Mikli, V.

prindi

Use of atomic-force microscopy for characterization of silicon, implated with heavy ions at high doses

autor

Angelov, Christo

Groudev, P.

Mikli, Valdek

vastutusandmed

Ch. Angelov, P. Groudev, V. Mikli

allikas

Proceedings of 11th Conference "Materials for Information Tech. in the New Millenium" : ISCMP : Varna, 2001

ilmumiskoht

[S.l.]

ilmumisaasta

2001

leheküljed

p. 460-464

keel

inglise

Angelov, Ch., Groudev, P., Mikli, V. Use of atomic-force microscopy for characterization of silicon, implated with heavy ions at high doses // Proceedings of 11th Conference "Materials for Information Tech. in the New Millenium" : ISCMP : Varna, 2001. [S.l.], 2001. p. 460-464.